Using Accurate Solid Angle Tools when Comparing EDS Detector Geometries

Analysts should strive for the EDS system that provides the highest efficiency for their analytical work. For detectors, that typically means starting with the geometry with the best solid angle (SA) value. Manufacturers should be designing interfaces to maximize the solid angle of the detectors without compromising the integrity of the electron columns. Accurate modeling of the solid angle is required for both analysts and manufacturers so that everyone is satisfied with the detector performance. This paper will show that new solid angle calculations must be used for accurate solid angle modeling. Application of these models to new geometries illustrates the performance benefits of creative geometric designs.